The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2006
Filed:
Mar. 27, 2003
Applicants:
Christoph Hocke, Dresden, DE;
Michael Lering, Bubenreuth, DE;
Gregor Kübart, Dresden, DE;
Inventors:
Assignee:
Infineon Technologies AG, Munich, DE;
Primary Examiner:
Int. Cl.
CPC ...
G06F 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An installation for processing a semiconductor wafer includes a semiconductor fabrication device having a load port, on which an identity code that can be read optically or through an effective electromagnetic field is stored. A mobile device, for example, a container communicating with the load port or a vehicle for transporting such a container, contains a corresponding reader to determine the identifier. The configuration makes the flexible determination of position within a fabrication facility possible. Also provided is a method for operating the installation.