The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 30, 2006

Filed:

Sep. 04, 2003
Applicants:

Frank Niklaus, Stockholm 112 26, SE;

Göran Stemme, Stockholm 114 21, SE;

Inventors:

Frank Niklaus, Stockholm 112 26, SE;

Göran Stemme, Stockholm 114 21, SE;

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01); C23F 1/00 (2006.01); H01L 21/00 (2006.01); H01L 21/44 (2006.01); H01L 29/84 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of combining components to form an integrated device, wherein at least one first component is provided on a first surface of a sacrificial substrate, and at least one second component is provided on a first surface of a non-sacrificial substrate. At least one support structure is formed on at least one of the first surfaces of the sacrificial substrate, and the non-sacrificial substrate, respectively, such that said at least one support structure is extended outwardly from at least one of the first surfaces. The sacrificial substrate carrying the first component, and the non-sacrificial substrate carrying the second component, respectively, are bonded, so that the first and second surfaces will be facing one another with a distance defined by a thickness of the support structure. At least a part of the sacrificial substrate is removed. The first component and second components are interconnected.


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