The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2006
Filed:
Sep. 16, 2002
Katsuhiko Tsuura, Osaka, JP;
Katsuhiko Tsuura, Osaka, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
A semiconductor integrated circuit device includes: Si substrate; multilevel interconnect layer formed on the Si substrate; and dielectric layer formed on the multilevel interconnect layer. External-component-connecting wire, ordinary wire, fuse wire, stepper alignment mark, and target mark are formed out of an identical copper film in the uppermost metal layer. External-component-connecting pad electrode, testing-processing alignment mark, and stepper alignment mark are formed out of an identical aluminum alloy film on the dielectric film. In laser-machining the fuse wire, alignment using the target mark formed in the metal layer including the fuse wire reduces alignment errors caused from the machining.