The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2006
Filed:
Apr. 21, 2004
Muneo Mitamura, Nagano-ken, JP;
Kazuhiro Hane, Sendai-shi, Miyagi-ken, 981-0952, JP;
Yoshinori Ito, Nagano-ken, JP;
Muneo Mitamura, Nagano-ken, JP;
Kazuhiro Hane, Sendai-shi, Miyagi-ken, 981-0952, JP;
Yoshinori Ito, Nagano-ken, JP;
Harmonic Drive Systems Inc., Tokyo, JP;
Other;
Abstract
A projection linear encoder has an SOQ substrate formed with transmission gratings and grid-like photodiode groups, and a reflecting grating plate with reflecting gratings that are formed facing thereto. A light-blocking film composed of a metal thin film or the like is formed on a surface of a glass substrate of the SOQ substrate, and the transmission gratings are formed by patterning the light-blocking film. The photodiodes are integrally formed by epitaxial growth on the silicon layer of the SOQ substrate. Transmission gratings with high mechanical strength can be formed inexpensively in comparison with cases in which through holes are formed by etching a silicon substrate to manufacture transmission gratings.