The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2006
Filed:
Mar. 10, 2005
Takeshi Honda, Nakajo, JP;
Yoko Shimizu, Niigata, JP;
Hiroshi Matsuda, Arakawa, JP;
Hiroshi Mukai, Ishioka, JP;
Takeshi Honda, Nakajo, JP;
Yoko Shimizu, Niigata, JP;
Hiroshi Matsuda, Arakawa, JP;
Hiroshi Mukai, Ishioka, JP;
Hitachi, Ltd., Tokyo, JP;
Hitachi Industrial Equipment Systems Co., Ltd., Chiba, JP;
Abstract
An air shower for removing a particle from an object by blowing air to the object which includes at least one first outlet for discharging the air from the at least one first outlet toward at least a portion of the object so that a flow axis of the air flowing out of the at least one first outlet is swung frequently and alternately in a first swingable direction, and at least one second outlet for discharging the air from the at least one second outlet so that a flow axis of the air flowing out of the at least one second outlet is swung frequently and alternately in a second swingable direction which is different from the first swingable direction. The first swingable direction and the second swingable direction extend so as to be non-parallel to one another and to intersect one another.