The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2006
Filed:
Jun. 13, 2000
Mark A. Lemkin, El Cerrito, CA (US);
William A. Clark, Fremont, CA (US);
Thor N. Juneau, Berkeley, CA (US);
Allen W. Roessig, Fremont, CA (US);
Mark A. Lemkin, El Cerrito, CA (US);
William A. Clark, Fremont, CA (US);
Thor N. Juneau, Berkeley, CA (US);
Allen W. Roessig, Fremont, CA (US);
Analog Devices IMI, Inc., Berkeley, CA (US);
Abstract
A movable microstructure includes a first finger set comprising two or more first fingers affixed to a substrate and extending substantially parallel to a defined displacement axis towards a proof-mass. The movable microstructure further includes a second finger set comprising at least one second finger, each member of the second finger set extending substantially parallel to the displacement axis from the proof-mass, terminating between two first fingers. Each second finger is substantially closer to one of the two first fingers between which it terminates. The first finger set, in conjunction with the second finger set, form two terminals of a capacitor. An electrical circuit is included that provides a voltage across the capacitor to generate a position-dependent force, the position-dependent force having a component along an axis substantially orthogonal to the displacement axis, the magnitude of the position-dependent force varying in proportion to displacement along the displacement axis.