The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 2006
Filed:
Nov. 25, 2003
Masaichi Miyano, Akita, JP;
Mitsunao Homma, Akita, JP;
Masaichi Miyano, Akita, JP;
Mitsunao Homma, Akita, JP;
TDK Corporation, Tokyo, JP;
Abstract
An actuator to which leads are easily attachable, and a method of making the same are provided. In the actuator in accordance with the present invention, a pair of silicon arms have their resistances lowered by being doped with impurities and are connected to each other by way of a glass substrate. A predetermined surface of each silicon arm is formed with a piezoelectric part, whereas a predetermined surface of the piezoelectric part is formed with a thin-film electrode. Therefore, the piezoelectric part is driven when a voltage is applied between a bonding wire attached to the thin-film electrode and a bonding wire attached to the silicon arm. Since the bonding wire can be attached to the silicon arm at any position thereon, wire bonding can be carried out while appropriately selecting positions and surfaces where the bonding wire is easily attachable.