The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 2006
Filed:
Oct. 30, 2002
Applicants:
Andrew Case, Silver Springs, MD (US);
Gregory D. Cooper, Alexandria, VA (US);
Erin Fleet, Alexandria, VA (US);
Inventors:
Andrew Case, Silver Springs, MD (US);
Gregory D. Cooper, Alexandria, VA (US);
Erin Fleet, Alexandria, VA (US);
Assignee:
Pixelligent Technologies LLC, College Park, MD (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/32 (2006.01); G03B 27/42 (2006.01); G03B 27/54 (2006.01);
U.S. Cl.
CPC ...
Abstract
Advanced techniques for programmable photolithograhy provide enhanced resolution and other aspects of a photolithography system. The pseudo-inverse of a matrix is applied to the results of a calculation to control exposure energies.