The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 2006
Filed:
Jan. 28, 2004
Applicants:
Jin-ho Choi, Suwon, KR;
Han-su OH, Suwon, KR;
Inventors:
Jin-ho Choi, Suwon, KR;
Han-su Oh, Suwon, KR;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01); H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a method of fabricating local interconnection, a selective epitaxial growth seed layer pattern is formed on a region of a semiconductor substrate where a local interconnection is to be formed. A selective epitaxial layer is formed by performing epitaxial growth on the resultant structure. The resistance of the selective epitaxial layer is reduced to complete the local interconnection.