The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 2006
Filed:
Apr. 13, 2000
Frank Werfel, Leipzig, DE;
Jürgen Seeberger, Passau, DE;
Frank Werfel, Leipzig, DE;
Jürgen Seeberger, Passau, DE;
Gebrüder Decker GmbH & Co. KG, Nürnberg, DE;
Abstract
A device () for treating objects, in particular silicon wafers (), with a fluid (), comprising a container () that holds the fluid (); a rotatable carrying arrangement () for accommodation of the objects to be treated, which is disposed at least partially in the container (); and a rotatably drivable shaft, which is run on at least one bearing () and joined to the carrying arrangement (); with the bearing () including a first bearing member (), which is joined to the shaft, and a second bearing member (), which adjoins the first bearing member () and contains superconductive material; with the first bearing member () being kept spaced from the second bearing member () by magnetic forces.