The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 2006
Filed:
Jan. 15, 2004
Yakov Kogan, Bedford, MA (US);
Daryoosh Vakhshoori, Cambridge, MA (US);
Peidong Wang, Carlisle, MA (US);
Yakov Kogan, Bedford, MA (US);
Daryoosh Vakhshoori, Cambridge, MA (US);
Peidong Wang, Carlisle, MA (US);
Ahura Corporation, Wilmington, MA (US);
Abstract
A pressure sensor is disclosed for measuring fluid pressure comprising a pressure sensing structure comprising a mass target suspended on a spring mechanism, wherein the mass target and the spring mechanism together exhibit high Q mechanical resonance, wherein the mass target has an area which is presented in a plane perpendicular to the direction of the mechanical oscillation of the structure, and further wherein the mass target and the spring mechanism are in the form of a membrane, and transducer means for measuring the fluid pressure by characterizing the effects that the fluid molecules produce on the motion of the structure.