The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2006
Filed:
Apr. 06, 2004
Srinath Krishnan, Campbell, CA (US);
Srinath Krishnan, Campbell, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
A method of manufacturing a semiconductor device includes forming a gate, source/drain extensions, buffer regions, and source/drain regions. The gate is formed over a semiconductor layer, and the source/drain extensions are formed within the semiconductor layer and adjacent the gate. The buffer regions are formed within first amorphous implant regions, and the source/drain regions are formed within second amorphous implant regions. The buffer regions and the source/drain regions are activated using solid-phase epitaxy whereby sidewalls of the activated buffer regions and the activated source/drain regions are substantially vertical.