The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2006
Filed:
Aug. 24, 2000
Applicants:
Volker Weinrich, München, DE;
Manfred Engelhardt, Feldkirchen-Westerham, DE;
Werner Pamler, München, DE;
Hermann Wendt, Grasbrunn, DE;
Inventors:
Volker Weinrich, München, DE;
Manfred Engelhardt, Feldkirchen-Westerham, DE;
Werner Pamler, München, DE;
Hermann Wendt, Grasbrunn, DE;
Assignee:
Infineon Technologies AG, Munich, DE;
Primary Examiner:
Int. Cl.
CPC ...
H01B 13/00 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The electrode configuration includes at least one structured layer. A mask is produced on the layer to be structured and the layer is dry etched. The mask is at least slightly etchable by dry etching. The mask contains a metal silicide, a metal nitride or a metal oxide.