The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2006
Filed:
Dec. 02, 2004
Hyun-joo Yun, Gyeonggi-do, KR;
Sang-seon Lee, Gyeonggi-do, KR;
Jong-bok Kim, Gyeonggi-do, KR;
Kwang-hee Lee, Gyeonggi-do, KR;
Min-su Kim, Seoul, KR;
Hyun-sung Lee, Gyeonggi-do, KR;
Hyun-Joo Yun, Gyeonggi-do, KR;
Sang-Seon Lee, Gyeonggi-do, KR;
Jong-Bok Kim, Gyeonggi-do, KR;
Kwang-Hee Lee, Gyeonggi-do, KR;
Min-Su Kim, Seoul, KR;
Hyun-Sung Lee, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
The present invention discloses an apparatus for transporting wafers. The apparatus includes a tray having a sloped portion on which a wafer having a sidewall can be mounted, a plurality of guides that disposed about the tray, and a plurality of sensors for detecting the position of the sidewall of the wafer with respect to the tray on which it is mounted by sensing the position of the sidewall. The present invention also discloses an apparatus for polishing wafers having the apparatus for transporting wafers comprising the circular tray and a plurality of guides and a plurality of sensors above-mentioned.