The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2006
Filed:
Jun. 10, 2004
Frederick G. Johnson, Lanham, MD (US);
Oliver S. King, Annapolis, MD (US);
David M. Gill, Pasadena, MD (US);
Timothy J. Davidson, Baltimore, MD (US);
Warren P. Berk, Joppatowne, MD (US);
Frederick G. Johnson, Lanham, MD (US);
Oliver S. King, Annapolis, MD (US);
David M. Gill, Pasadena, MD (US);
Timothy J. Davidson, Baltimore, MD (US);
Warren P. Berk, Joppatowne, MD (US);
Little Optics, Inc., Annapolis Junction, MD (US);
Abstract
Silicon-oxycarbide optical waveguides and thermooptic devices include a substrate and a first cladding layer having a first refractive index positioned over a substrate. A first core layer comprising silicon, oxygen, and carbon and having a core refractive index is formed on the first cladding layer by chemical vapor deposition using at least two precursors: one inorganic silicon precursor gas and at least one second precursor gas comprising carbon and oxygen. Alternatively, at least three precursors can be used: one inorganic silicon precursor gas, a second precursor comprising carbon, and a third precursor comprising oxygen. The core layer is lithographically patterned to define waveguide elements. A second cladding layer having a second cladding refractive index is formed to surround the optical core waveguiding element of the first core layer.