The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 09, 2006

Filed:

Jun. 08, 2004
Applicants:

Shingo Takahashi, Kanagawa, JP;

Yoshiyuki Enomoto, Kanagawa, JP;

Hideshi Abe, Kanagawa, JP;

Inventors:

Shingo Takahashi, Kanagawa, JP;

Yoshiyuki Enomoto, Kanagawa, JP;

Hideshi Abe, Kanagawa, JP;

Assignee:

Sony Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A solid-state image pickup deviceis constructed in which a waveguideis formed in an insulating layer on a light-receiving sensor portiona side wallof the waveguideis covered with a reflective filmmade of an Al film deposited by a CVD method, an underlayer filmis formed between the reflective filmand the side wallof the waveguideand the underlayer filmis made of a VIb-group element. It is possible to obtain a solid-state image pickup device including a waveguide in which hydrogen supplied to the light-receiving sensor portioncan be restrained from being absorbed by the underlayer filmand which has the reflective filmof high reflectivity with satisfactory surface condition, satisfactory coverage and excellent adhesion.


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