The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2006
Filed:
Aug. 24, 2004
Young-ok Kim, Gyeonggi-do, KR;
Soon-byung Park, Gyeonggi-do, KR;
Young-Ok Kim, Gyeonggi-do, KR;
Soon-Byung Park, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A first conduction type well is formed in a substrate, and a second conduction type impurity region is formed in the well. A lower interlayer dielectric is formed on the substrate, including the well and the impurity region. A contact plug, connected to the impurity region through the lower interlayer dielectric, is formed with a void inside it. An upper interlayer dielectric is formed on the lower interlayer dielectric and the contact plug. The upper interlayer dielectric is selectively etched, forming an interconnection groove exposing the contact plug. The contact plug and the exposed void are overetched, extending the void into the first conduction type well. The interconnection groove is filled with a conductive layer, forming an interconnection. A seam extending to the well is formed in the void, connecting the contact plug to the well. Due to the seam, a well bias may be applied to the well.