The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2006
Filed:
Apr. 02, 2004
Applicants:
Toshiyuki Kawakami, Tenri, JP;
Yukio Yamasaki, Daitou, JP;
Shigetoshi Ito, Ikoma, JP;
Susumu Omi, Osaka, JP;
Inventors:
Toshiyuki Kawakami, Tenri, JP;
Yukio Yamasaki, Daitou, JP;
Shigetoshi Ito, Ikoma, JP;
Susumu Omi, Osaka, JP;
Assignee:
Sharp Kabushiki Kaisha, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a wafer having an LD structureformed on a GaN-based substrate, cleavage guide groovesare formed in its surface by scribing from above the LD structurewith a diamond needle. The cleavage guide groovesare formed one along each of stripe-shaped waveguidesformed parallel to the <1-100> direction of the wafer, and are formed in the shape of broken lines in the <11-20> direction of the wafer.