The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2006
Filed:
Sep. 12, 2002
Applicants:
Shinji Kishimura, Itami, JP;
Masayuki Endo, Izumi, JP;
Masaru Sasago, Hirakata, JP;
Mitsuru Ueda, Tokyo, JP;
Tsuyohiko Fujigaya, Koshigaya, JP;
Inventors:
Shinji Kishimura, Itami, JP;
Masayuki Endo, Izumi, JP;
Masaru Sasago, Hirakata, JP;
Mitsuru Ueda, Tokyo, JP;
Tsuyohiko Fujigaya, Koshigaya, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C 1/73 (2006.01); G03F 7/39 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01);
U.S. Cl.
CPC ...
Abstract
A pattern formation material of this invention contains a base polymer including a unit represented by Chemical Formula 1 and, and an acid generator: Chemical Formula 1: wherein Ris a hydrogen atom, a chlorine atom, a fluorine atom, an alkyl group or an alkyl group including a fluorine atom; and Ris a protecting group released by an acid.