The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2006
Filed:
Mar. 20, 2002
Kenji Ando, Kanagawa-ken, JP;
Masaaki Matsushima, Kanagawa-ken, JP;
Minoru Otani, Tokyo, JP;
Yasuyuki Suzuki, Kanagawa-ken, JP;
Ryuji Biro, Kanagawa-ken, JP;
Hidehiro Kanazawa, Tokyo, JP;
Kenji Ando, Kanagawa-ken, JP;
Masaaki Matsushima, Kanagawa-ken, JP;
Minoru Otani, Tokyo, JP;
Yasuyuki Suzuki, Kanagawa-ken, JP;
Ryuji Biro, Kanagawa-ken, JP;
Hidehiro Kanazawa, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
The present invention provides a method for forming a film of aluminum oxide in which a target containing aluminum is sputtered in a gas containing fluorine atoms. The thin film of aluminum oxide according to the present invention has little optical absorption and high refractive index in the ultraviolet and vacuum ultraviolet regions.