The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2006
Filed:
Jan. 11, 2002
Minako Horiba, Kawasaki, JP;
Yasuhiro Suzuki, Kawasaki, JP;
Minako Horiba, Kawasaki, JP;
Yasuhiro Suzuki, Kawasaki, JP;
Showa Denko K.K., Tokyo, JP;
Abstract
A process for purifying octafluoropropane according to the present invention includes the step of contacting a crude octafluoropropane containing impurities with an impurity decomposing agent under an elevated temperature and then with an adsorbent to substantially remove the impurities from the crude octafluoropropane. According to the purification process or preparation process of octafluoropropane of the present invention, impurities such as chlorine compounds can be substantially removed and a high-purity octafluoropropane can be easily obtained. The octafluoropropane obtained by the purification process of the present invention is substantially free of impurities and, therefore, can be used as an etching or cleaning gas for use in the production process of a semiconductor device and the like.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile