The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2006
Filed:
Feb. 16, 2005
Thomas Moelkner, Stuttgart, DE;
Ralf Henn, Gomaringen, DE;
Werner Steiner, Boeblingen, DE;
Hans-peter Didra, Kusterdingen-Jettenburg, DE;
Philip Cutuli, Reutlingen, DE;
Frank Klopf, Waldbuettelbrunn, DE;
Thomas Moelkner, Stuttgart, DE;
Ralf Henn, Gomaringen, DE;
Werner Steiner, Boeblingen, DE;
Hans-Peter Didra, Kusterdingen-Jettenburg, DE;
Philip Cutuli, Reutlingen, DE;
Frank Klopf, Waldbuettelbrunn, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A micromechanical pressure sensor and a method for producing a micromechanical pressure sensor. This pressure sensor has at least one membrane and a measuring element situated on the membrane. A pressure applied at the membrane or a pressure differential applied at the different sides of the membrane results in deformation of the membrane. Simultaneous with the deformation of the membrane, the measuring element is subjected to elastic elongation and/or compression. In a piezo-sensitive component, such elastic elongation and/or compression generates a measured variable in the measuring element, which represents the applied pressure or the applied pressure differential at the membrane. It is provided in this context that the measuring element have at least partially a NiCr(Si) layer. Due to an at least partial crystallization in the production of the micromechanical pressure sensor, this NiCr(Si) layer has more advantageous piezoelectrical characteristics than an amorphous NiCr(Si) layer.