The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 2006
Filed:
Jun. 23, 2004
David Shiao-min Kuo, Palo Alto, CA (US);
Christopher Joseph Formato, Brentwood, CA (US);
Neil Deeman, Alamo, CA (US);
Sundeep Chauhan, Edina, MN (US);
Lawrence Matthias Bryant, Palo Alto, CA (US);
David Shiao-Min Kuo, Palo Alto, CA (US);
Christopher Joseph Formato, Brentwood, CA (US);
Neil Deeman, Alamo, CA (US);
Sundeep Chauhan, Edina, MN (US);
Lawrence Matthias Bryant, Palo Alto, CA (US);
Seagate Technology LLC, Scotts Valley, CA (US);
Abstract
Embodiments of the invention generally provide an electron beam substrate processing system. In one embodiment, the present invention provides an electron beam substrate processing system where a spindle shaft used to rotate substrates during processing includes two encoder wheels. One encoder wheel is configured to provide a rotational speed data signal to a rotational speed control system. Another encoder wheel is configured to provide a pattern generator clock signal at a higher frequency than the rotational speed data signal to a pattern generator. In one embodiment of the present invention, at least one of the encoder wheels is positioned adjacent the substrate to minimize torsional and differential movements between the at least one encoder wheel and the substrate.