The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 2006
Filed:
Jan. 28, 2003
Applicant:
Takayuki Hayashi, Shimosuwa-machi, JP;
Inventor:
Takayuki Hayashi, Shimosuwa-machi, JP;
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/36 (2006.01);
U.S. Cl.
CPC ...
Abstract
An atmosphere of an inert gas inside a chamber room in a chamber apparatus is replaced with an outside air by opening a discharge passage in the chamber room and by closing a gas supply passage for supplying the inert gas. The outside air is thus forcibly sent to the chamber room to thereby replace the inert gas remaining inside the chamber room with the outside air.