The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2006
Filed:
Jun. 11, 1999
Susumu Goto, Tama, JP;
Susumu Goto, Tama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A projection apparatus includes a charged particle beam source, a reduction lens, a charged particle shaping aperture having an arcuate opening, a collimator lens, and first and second projection lenses. A charged particle beam emerging from the charged particle beam source irradiates a mask placed on a mask stage to transfer a pattern on the mask onto a sample on a sample stage. The first and second projection lenses can move their first and second principal plane positions with an excitation strength ratio control circuit.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile