The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2006
Filed:
May. 23, 2005
Applicants:
Ki Won Nam, Gyeonggi-do, KR;
Kyung Won Lee, Seoul, KR;
Inventors:
Ki Won Nam, Gyeonggi-do, KR;
Kyung Won Lee, Seoul, KR;
Assignee:
Hynix Semiconductor Inc., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention discloses a method for fabricating a semiconductor device wherein precursor and deposition conditions of a bit line hard mask nitride film and a spacer nitride film are varied so that the nitride films are formed to have different etching ratios for sufficient protection of the bit line during an SAC process.
Nam, Ki. (2006). Method for fabricating a semiconductor device (U.S. Patent No. 7033955). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7033955
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile