The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2006
Filed:
Mar. 20, 2002
Applicants:
Klaus Mauthner, Vienna, AT;
Xinhe Tang, Vienna, AT;
Roland Haubner, Vienna, AT;
Inventors:
Assignee:
Electrovac, Fabrikation, Elektrotechnischer Spezialartikel, Gesellschaft mbH, Klosterneuburg, AT;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
D01F 9/127 (2006.01); C23C 16/26 (2006.01); C23C 16/46 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a method of producing a nanotube layer on a substrate by using a CVD process, the substrate is placed in a reaction chamber, which is flushed with a carbon-containing gas. Subsequently, the substrate is heated by an induction process to a temperature at which carbon from the gas phase is deposited on the substrate while forming nanotubes thereon.