The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2006

Filed:

Jan. 24, 2003
Applicants:

Armin Conrad, Herborn, DE;

Peter Fahrenbach, Braunfels, DE;

Matthias Mädler, Driedorf, DE;

Inventors:

Armin Conrad, Herborn, DE;

Peter Fahrenbach, Braunfels, DE;

Matthias Mädler, Driedorf, DE;

Assignee:

Pfeifer Vacuum GmbH, Asslar, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 23/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

A vacuum pump system includes at least one high-vacuum pump, a fore-vacuum pump, and at least one intermediate pump, arranged between the at least one high-vacuum pump and the fore-vacuum pump and having its inlet connected directly and exclusively with the outlet of the high-vacuum pump.


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