The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2006
Filed:
Jun. 21, 2001
Takeshi Azami, Tokyo, JP;
Takeshi Azami, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
Temperature of molten siliconin an infrared image furnaceincluding a halogen lampas a heating source to grow a single crystal of silicon in a floating-zone method is measured with high precision according to light radiated from the molten silicon. By disposing an optical path tube extending to the molten silicon, light propagating from the molten siliconin a particular direction can be extracted. As a result, light radiated from the molten siliconcan be extracted while reducing the influence of disturbance of light from various directions such as light radiated from the halogen lamp, reflected light and scattered light thereof, and the like. Luminance of light thus extracted is measured by a CCD camerato obtain the temperature according to the luminance, and hence the temperature can be measured with high precision using a measuring apparatus of a simple configuration.