The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2006
Filed:
Oct. 29, 2003
James R. Biard, Richardson, TX (US);
Klein L. Johnson, Orono, MN (US);
Ralph H. Johnson, Murphy, TX (US);
Gyoungwon Park, Medina, MN (US);
Tzu-yu Wang, Maple Grove, MN (US);
James R. Biard, Richardson, TX (US);
Klein L. Johnson, Orono, MN (US);
Ralph H. Johnson, Murphy, TX (US);
Gyoungwon Park, Medina, MN (US);
Tzu-Yu Wang, Maple Grove, MN (US);
Finisar Corporation, Sunnyvale, CA (US);
Abstract
A process for making a laser structure. The process is for the fabrication of a laser device such a vertical cavity surface emitting laser (VCSEL). The structures made involve dielectric and spin-on material planarization over wide and narrow trenches, coplanar contacts, non-coplanar contacts, thick and thin pad dielectric, air bridges and wafer thinning.