The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2006
Filed:
May. 23, 2002
Akira Matsumoto, Basel, CH;
Hitoshi Yamato, Takarazuka, JP;
Toshikage Asakura, Minoo, JP;
Masaki Ohwa, Kobe, JP;
Peter Murer, Allschwil, CH;
Akira Matsumoto, Basel, CH;
Hitoshi Yamato, Takarazuka, JP;
Toshikage Asakura, Minoo, JP;
Masaki Ohwa, Kobe, JP;
Peter Murer, Allschwil, CH;
Ciba Specialty Chemicals Corp., Tarrytown, NY (US);
Abstract
New oxime sulfonate compounds of the formula (I) and (II), wherein Ris C-Calkyl, CChaloalkyl, hydrogon, OR, NRR, SRor is phenyl which is unsubstituted or substituted by OH, C-Calkyl, halogen and/or C-Calkoxy; R, R, Rand Rare for example hydrogen or C-Calkyl; Ris for example is C-Calkylsulfonyl, phenyl-C-Calkylsulfonyl or phenylsulfonyl; R'is for example phenylenedisulfonyl or diphenylenedisulfonyl; R, Rand Rfor example are hydrogen or C-Calkyl; Rand R, are for example hydrogen or C-Calkyl; Ris for example hydrogen, phenyl or C-Calkyl; A is S, O, NR, or a group of formula A1, A2 or A3, Rand R22 independently of one other have one of the meanings given for R; R, R, Rand Rindependently of one another are for example hydrogen, C-Calkyl, halogen or phenyl; Z is CRor N; and Zis CRor N; and Zis CRor N; and Zis CH, S, O or NRare particularly suitable as photo-latent acids in resist applications.