The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2006
Filed:
Feb. 27, 2002
John Madocks, Tucson, AZ (US);
John Madocks, Tucson, AZ (US);
Applied Process Technologies, Inc., Tucson, AZ (US);
Abstract
A chill drum () is modified to improve heat transfert between the drum and a flexible web substrate () disposed around the drum. The drum surface () contains a series of passages () and distribution holes (). A working gas is injected into these passages and flows out of the distribution holes into the space between the web and drum. A cover () prevents working gas from escaping from frum passages in the area not covered by the web, and supplies the working gas to the passages at the drum cover. Once gas is in the passages, leakage only occurs from the edges of the web. The pressure in the passages remains essentially constant around the drum, producing uniform elevated pressures under the entire web. Elevated pressure behind the web significantly improves overall heat transfert, thereby allowing higher deposition rates and other process advantages.