The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2006
Filed:
Apr. 08, 2005
David L. Malametz, Lynnwood, WA (US);
David L. Malametz, Lynnwood, WA (US);
Honeywell International, Inc., Morristown, NJ (US);
Abstract
An apparatus and method for sensing accelerations and other forces. The apparatus having a capacitance pick-off force sensor having a proof mass that is suspended relative to a relatively stationary frame by a plurality of serpentine suspension members having internal caging. The device provides easily implemented fabrication modification for trading-off between input range and pick-off sensitivity by altering etching periods of the serpentine suspension members. The input range and pick-off sensitivity can be traded-off by enlarging or reducing the quantity of elongated flexure fingers forming the serpentine suspension member. Different ones of the elongated flexure fingers are optionally formed with different thicknesses, whereby the serpentine suspension member exhibits a spring rate that progressively increases as it is compressed by in-plane motion of the proof mass relative to the relatively stationary frame.