The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2006
Filed:
Apr. 04, 2002
Satoru Fujii, Takatsuki, JP;
Isaku Kanno, Nara, JP;
Ryoichi Takayama, Suita, JP;
Takeshi Kamada, Nara, JP;
Satoru Fujii, Takatsuki, JP;
Isaku Kanno, Nara, JP;
Ryoichi Takayama, Suita, JP;
Takeshi Kamada, Nara, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
To manufacture a compact and high-performance thin-film piezoelectric bimorph element at low cost, first and second piezoelectric thin films () are formed by sputtering on the both surfaces of a metal thin plate () which are opposing relation to each other along the thickness thereof, while the respective states of polarizations of the first and second piezoelectric thin films () are controlled. A pair of electrode films () are formed on the respective surfaces of the first and second piezoelectric thin films () opposite to the metal thin plate ().