The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2006
Filed:
Jun. 08, 2004
Fuh-cheng Jong, Tainan City 70414, TW;
Fuh-Cheng Jong, Tainan City 70414, TW;
Other;
Abstract
The present invention disclosed a silicon barrier capacitor device structure. By applying CVD or PVD technologies to deposit poly-silicon layers as the dielectric of capacitor on the doping region of the wafer, then implant a high-density (10˜10/cm) impurity of the group III or group V elements and oxygen ion or nitrogen ion to the poly-silicon layer. After implantation, deposit a low resistance and high melting point conductor on the poly-silicon layer for the electrode. to form a capacitor structure, or repeat all of the deposition poly-silicon and both of the low resistance and high melting point conductor on the poly-silicon layer more than once. All of the odd electrodes are connected together. The even electrodes and the substrate are connected together, too. At last, apply high temperature furnace annealing to the devices. The grain boundary of the silicon was oxidized by oxygen and nitrogen to form an isolation film to be the insulation film. The impurity of group III or group V will decrease the resistance of the grain.