The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2006
Filed:
Jan. 06, 2003
Anil K. Chinthakindi, Poughkeepsie, NY (US);
Shwu-jen Jeng, Wappingers Falls, NY (US);
Michael F. Lofaro, Milton, NY (US);
Christopher M. Schnabel, Poughkeepsie, NY (US);
Kenneth J. Stein, Sandy Hook, CT (US);
Anil K. Chinthakindi, Poughkeepsie, NY (US);
Shwu-Jen Jeng, Wappingers Falls, NY (US);
Michael F. Lofaro, Milton, NY (US);
Christopher M. Schnabel, Poughkeepsie, NY (US);
Kenneth J. Stein, Sandy Hook, CT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method is disclosed of fabricating a MIMCAP (a capacitor (CAP) formed by successive layers of metal, insulator, metal (MIM)) and a thin film resistor at the same level. A method is also disclosed of fabricating a MIMCAP and a thin film resistor at the same level, and a novel integration scheme for BEOL (back-end-of-line processing) thin film resistors which positions them closer to FEOL (front-end-of-line processing) devices.