The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 04, 2006

Filed:

Oct. 01, 2003
Applicant:

Takeshi Hanai, Kuwana, JP;

Inventor:

Takeshi Hanai, Kuwana, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 9/42 (2006.01);
U.S. Cl.
CPC ...
Abstract

An object of the present invention is to efficiently adjust a positional difference (measured along the direction perpendicular to the center electrode axis) between the center electrode (CE) axis and the center of the earth electrode (EE). The CE tip and EE tip surface are illuminated from the front of the EE tip surface, thereby picking up their images. The image processing unit calculates the positional difference between the CE axis and EE center. Here, the EE center is defined by an area centroid of the EE tip surface area, thereby improving a measurement accuracy. The adjustment unit connected with the image processing unit causes the actual positional difference to decrease by moving EE by the that calculated positional difference, taking a prescribed spring-back into consideration. EE is moved by a jig moved by a screw rotated by a motor.


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