The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2006
Filed:
Apr. 01, 2003
Amish Desai, Altadena, CA (US);
Ravi Kant Verma, Pasadena, CA (US);
Massimo Antonio Sivilotti, Sierra Madre, CA (US);
Amish Desai, Altadena, CA (US);
Ravi Kant Verma, Pasadena, CA (US);
Massimo Antonio Sivilotti, Sierra Madre, CA (US);
Tanner Research, Inc., Pasadena, CA (US);
Abstract
A versatile cavity actuator. The versatile cavity actuator includes a cavity having one or more polymer-based sidewalls. An energetic material is disposed therein. A heater is disposed on or within the cavity. In a specific embodiment, the cavity includes a thermally insulating base positioned beneath the heater, which is positioned near the bottom of the cavity. The polymer-based sidewalls are constructed from a photo-curable epoxy, which is disposed on a substrate via microelectromechanical processes. The sidewalls are angled or parabolic and are constructed via a low-temperature lithographic spin process compatible with post integrated circuit processing.