The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2006
Filed:
Sep. 11, 2003
Shoji Hashimoto, Seto, JP;
Kouji Tsukada, Seto, JP;
Kentaro Mizuno, Nisshin, JP;
Jiro Sakata, Nagoya, JP;
Yoshiteru Omura, Seto, JP;
Yumi Masuoka, Aichi-gun, JP;
Shoji Hashimoto, Seto, JP;
Kouji Tsukada, Seto, JP;
Kentaro Mizuno, Nisshin, JP;
Jiro Sakata, Nagoya, JP;
Yoshiteru Omura, Seto, JP;
Yumi Masuoka, Aichi-gun, JP;
Kabushiki Kaisha Toyota Chuo Kenkyusho, Aichi-gun, JP;
Abstract
A force sensing element is provided with a gauge portion and a plurality of electrodes. The gauge portion is formed of an n-type semiconductor substrate whose (100)-face serves as a main face, a p-type semiconductor substrate whose (110)-face serves as a main face, or a p-type semiconductor substrate whose (111)-face serves as a main face, and is pressed in a thickness direction of the semiconductor substrate upon receiving a force. The electrodes are electrically connected to the gauge portion such that a current path extending in a direction corresponding to the thickness direction of the semiconductor substrate is formed in the gauge portion. The force sensing element thus constructed makes it possible to detect a force with high precision.