The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2006
Filed:
Jul. 07, 2004
Yasuhiko Hashimoto, Kobe, JP;
Yasuo Hirooka, Akashi, JP;
Takao Yamaguchi, Tojiyo-Cho, JP;
Hiroshi Kanda, Akashi, JP;
Yasuhiko Hashimoto, Kobe, JP;
Yasuo Hirooka, Akashi, JP;
Takao Yamaguchi, Tojiyo-Cho, JP;
Hiroshi Kanda, Akashi, JP;
Kawasaki Jukogyo Kabuishiki Kaisha, Kobe, JP;
Abstract
The angular position of a notch () is determined on the basis of data provided by second notch detectors () and () and an encoder (). A controller () turns a rotational arm () for angular displacement such that holders () and () are displaced in a circumferential direction B from the notch (), and then the holders () and () hold a wafer (). Since the holders () and () are in touch with edges in which the notch () is not formed, the first notch detector () is able to detect the notch () without difficulty. Thus the position of the wafer () relative to the rotational arm () does not need to be changed several times depending on positions at which the holders () and () hold the wafer (), which is necessary in the prior technology. The aligner () touches parts, not including the notch (), of the wafer () and is capable of adjusting the position of the wafer () in a short time.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile