The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 28, 2006

Filed:

Jan. 05, 2001
Applicants:

Jeffrey D. Birdsley, Austin, TX (US);

Michael R. Bruce, Austin, TX (US);

Brennan V. Davis, Austin, TX (US);

Rosalinda M. Ring, Austin, TX (US);

Daniel L. Stone, Cedar Park, TX (US);

Inventors:

Jeffrey D. Birdsley, Austin, TX (US);

Michael R. Bruce, Austin, TX (US);

Brennan V. Davis, Austin, TX (US);

Rosalinda M. Ring, Austin, TX (US);

Daniel L. Stone, Cedar Park, TX (US);

Assignee:

Advanced Micro Devices, Inc., Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/02 (2006.01); G01R 31/00 (2006.01); G01R 31/302 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention is directed to a system and method for analyzing an integrated circuit having silicon on insulator (SOI) structure. According to one example embodiment of the present invention, an optical beam arrangement is adapted to direct a modulated beam at a selected portion of the integrated circuit. The beam is sufficiently modulated to inhibit optical beam intrusion on the structure and operation of the integrated circuit. A reflected optical waveform response is obtained from the SOI selected portion. The inhibition of optical beam intrusion enhances the ability to analyze integrated circuits using an optical beam, making possible the use of analysis methods that otherwise would be difficult or even impossible to use.


Find Patent Forward Citations

Loading…