The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2006
Filed:
Dec. 20, 2004
Applicant:
Yeon-ha Cho, Yongin-si, KR;
Inventor:
Yeon-Ha Cho, Yongin-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
Abstract
A high-energy ion implanter monitors the recycling of a charge exchanging gas that is supplied to a stripper of a tandem accelerator. When the charge exchanging gas leaks out from the stripper and then flows into both energy boxes adjacent the tandem accelerator, gas sensors in the energy boxes measure the amount of the charge exchanging gas and send corresponding data to a controller. The controller compares the measured data with a standard data on the charge exchanging gas. When the measured data is different from the standard data, a pre-established interlocking system breaks off the operation of the implanter.