The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2006
Filed:
Apr. 09, 1998
Applicant:
Takehiko Hamada, Tokyo, JP;
Inventor:
Takehiko Hamada, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a position detecting system and method, an electron beam is irradiated to a sample including a portion to be measured, and the electron beam is caused to move in relation to the portion to be measured in the sample. Furthermore, a voltage is applied to the sample which is scanned by the electron beam, and a current flowing in the sample because of the applied voltage, is detected. Thus, the position of the portion to be measured can be determined from a scanning start position of the electron beam and the position where the detected current changes.