The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2006
Filed:
Apr. 06, 2004
Applicants:
Thomas Eisenhammer, Azmoos, CH;
Thomas Matt, Gofis, AT;
Gebhard Stittmatter, Constance, DE;
Klaus Zapf, Bretten, DE;
Inventors:
Thomas Eisenhammer, Azmoos, CH;
Thomas Matt, Gofis, AT;
Gebhard Stittmatter, Constance, DE;
Klaus Zapf, Bretten, DE;
Assignee:
Unaxis Balzers Ltd., Liechtenstein, LI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F26B 15/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
This invention relates to a system and a method for the heat treatment of substrates, incorporating an annular heat-treatment section with a rotary table designed to accept substrate holders, at least two of which substrate holders are positioned one behind the other in heat-treatment zones that extend in a radial spoke pattern around the center of the rotary table.