The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 28, 2006

Filed:

Mar. 29, 2005
Applicants:

Hiroshi Ishikawa, Kawasaki, JP;

Yoshitaka Nakamura, Yokohama, JP;

Hiroshi Tokunaga, Yokohama, JP;

Kenji Nagata, Yokohama, JP;

Inventors:

Hiroshi Ishikawa, Kawasaki, JP;

Yoshitaka Nakamura, Yokohama, JP;

Hiroshi Tokunaga, Yokohama, JP;

Kenji Nagata, Yokohama, JP;

Assignees:

Fujitsu Media Devices Limited, Yokohama, JP;

Fujitsu Limited, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01H 35/14 (2006.01);
U.S. Cl.
CPC ...
Abstract

An inertial sensor includes a sensing portion having a weight supported by beams, the weight being a movable portion, and a weight stopper that limits a movable range of the weight, the weight stopper being arranged in a vicinity of the weight with a given clearance and being a part of a substrate for the inertial sensor processed with MEMS techniques.


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