The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2006
Filed:
Sep. 18, 2002
Tsutomu Ueyama, Kyoto, JP;
Izuru Iseki, Kyoto, JP;
Norio Sato, Kanagawa, JP;
Katsuyuki Machida, Kanagawa, JP;
Hakaru Kyuragi, Tokyo, JP;
Tsutomu Ueyama, Kyoto, JP;
Izuru Iseki, Kyoto, JP;
Norio Sato, Kanagawa, JP;
Katsuyuki Machida, Kanagawa, JP;
Hakaru Kyuragi, Tokyo, JP;
Abstract
Prior to the start of transfer of an insulation film to a substrate, the degree of opening of a butterfly valve is set small so that evaporation of a solvent component contained in the insulation film is suppressed and the fluidity of the insulation film is ensured at the start of the transfer. On the other hand, the butterfly valve is totally opened at the start of the transfer, so that the pressure inside a thin film forming chamber rapidly decreases and transfer of the insulation film to the substrate is performed always in a low-pressure state (high-degree of vacuum).