The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2006
Filed:
May. 15, 2003
Jeffrey S. Cross, Kawasaki, JP;
Mineharu Tsukada, Kawasaki, JP;
Jeffrey S. Cross, Kawasaki, JP;
Mineharu Tsukada, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
After placing a sample in a heating vacuum chamber, a probe is climbed down to a position above a capacitor formed in the sample whose electrical characteristic is supposed to be measured. The probe is contacted with both electrodes of the capacitor, which is confirmed by electrical measurement. In order to measure capacitance loss, after filling Ngas up in the heating vacuum chamber, a mixed gas is introduced from a line for 3 vol % H+97 vol % Nto the inside of the heating vacuum chamber. After pressure has been stabilized there, capacitance loss and lapsed time are measured at the same time. Concentrations of residual HO and residual Oin the heating vacuum chamber are measured by a quadrupole mass spectrometer QMS; and at the same time, concentrations of each of residual HO and residual Oin an exhaust gas are measured by sensors.