The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2006
Filed:
Mar. 24, 2003
William J. Parrish, Santa Barbara, CA (US);
Jeffrey B. Barton, Goleta, CA (US);
Naseem Y. Aziz, Goleta, CA (US);
Adrienne N. Costello, Santa Barbara, CA (US);
William J. Parrish, Santa Barbara, CA (US);
Jeffrey B. Barton, Goleta, CA (US);
Naseem Y. Aziz, Goleta, CA (US);
Adrienne N. Costello, Santa Barbara, CA (US);
Indigo Systems Corporation, Goleta, CA (US);
Abstract
Systems and methods are disclosed for measuring a distance (or gap) between substrates of a hybrid semiconductor. The measurements may be made during a hybridization process to, for example, provide alignment feedback during the hybridization process. The measurements may also be made after the hybridization process to further calibrate the process or to provide information useful for further processing operations.