The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2006
Filed:
Oct. 11, 2001
Tatsuhiro Sato, Koriyama, JP;
Kazuo Koya, Koriyama, JP;
Tatsuhiro Sato, Koriyama, JP;
Kazuo Koya, Koriyama, JP;
Heraeus Quarzglas GmbH & Co. KG, Hanau, DE;
Shin-Etsu Quartz Products Co., Ltd., Tokyo, JP;
Abstract
It is an object of the present invention to provide a glass member resistant against plasma corrosion suitably used as a jig material in producing semiconductors, which exhibits excellent resistance against plasma corrosion, and which is free from the generation of particles. The above problem is solved by a glass member resistant to plasma corrosion, comprising a portion to be exposed to plasma gas, which is made of a glass material containing, as the essential component, one compound component selected from the group consisting of compounds expressed by one of the chemical formulae SiO—AlO—CaO, SiO—AlO—MgO, SiO—BaO—CaO, SiO—ZrO—CaO, SiO—TiO—BaO, provided that the constitution ratio of the compound components is within the vitrification range.