The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2006
Filed:
Oct. 30, 2003
Applicants:
Yi Yeol Lyu, Daejeon-Shi, KR;
Jin Heong Yim, Daejeon-Shi, KR;
Joon Sung Ryu, Icheon-Shi, KR;
Ki Yong Song, Seoul, KR;
Inventors:
Yi Yeol Lyu, Daejeon-Shi, KR;
Jin Heong Yim, Daejeon-Shi, KR;
Joon Sung Ryu, Icheon-Shi, KR;
Ki Yong Song, Seoul, KR;
Assignee:
Samsung Electronics Co., Ltd., Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 9/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed herein are a siloxane-based resin having novel structure and an interlayer insulating film for a semiconductor device formed using the same The siloxane-based resins have so low dielectric constant in addition to excellent mechanical properties, heat-stability and crack-resistance that they are useful materials for an insulating film between interconnect layers of a semiconductor device.